정밀 공작기계 안내면의 평행도 측정

Abstract

The guide-ways of precision machine tools are one of important element of machine tools. It has usually a pair of surfaces for constraint of one direction with bearing. In the case of precision machine tools, non-contact bearing such as hydrostatic bearing and aerostatic bearing is adopted usually. In this case, profiles of rails has effect on straightness and the clearance of bearing has effect on stiffness of guide way, which changes to higher if clearance changes to smaller. The clearance is varied along moving table according to relative distance of pair of rails. The relative distance of pair of rail can be divided by three properties. First and second properties are straightness of each pair of rail and bearing pad. And, third is parallelism about pair of rails and pairs of bearing pad. There are several methods for measuring straightness of each surface such as reversal method, sequential two point method, and way straightness. These straightness measuring methods are always acquiring deviation of profile from eliminating linear fitted inclined line and don't have the information of parallelism. Therefore, to get the small clearance for high stiffness, the straightness of rail and bearing pad and parallelism about pair of rails and pair of bearing pads are measured for correction such as regrinding, reassembling and lapping. In this research, new and easy method for measuring parallelism of pair of rails is suggested. Two displacement probe and sensor stage, which is carry on the displacement sensor, are needed. The simulation and experiment was accomplished about pair of horizontal guide way to confirm the measurement of parallelism. And, the third probe is added to measure the straightness of each rails by sequential two point method. From the estimation of combined these two methods, it is confirmed that the profiles of a pairs of rails can be measured.