랜덤 제조 오차를 고려한 모드 편재계수를 최소화하는 반복 배열 마이크로 공진기의 최적설계Design of MEMS Resonator Array for Minimization of Mode Localization Factor Subject to Random Fabrication Error

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This paper presents a robust optimal design method for a periodic structure type of MEMS resonator that is vulnerable to mode localization. The robust configuration of such a MEMS resonator to fabrication error is implemented by changing the regularity of periodic structure. For the mathematical convenience, the MEMS resonator is first modeled as a multi-pendulum system. The index representing the measure of mode variation is then introduced using the perturbation method and the concept of modal assurance criterion. Finally, the optimal intentional mistuning, minimizing the expectation of the irregularity measure for each substructure, is determined for the normal distributed fabrication error and its robustness in the design of MEMS resonator to the fabrication error is demonstrated with numerical examples.
Publisher
한국소음진동공학회
Issue Date
2005-05
Language
KOR
Citation

소음·진동 춘계학술대회 , pp.840 - 845

URI
http://hdl.handle.net/10203/152139
Appears in Collection
ME-Conference Papers(학술회의논문)
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