DC Field | Value | Language |
---|---|---|
dc.contributor.author | G.Khim, | - |
dc.contributor.author | C.H.Park, | - |
dc.contributor.author | H.Lee, | - |
dc.contributor.author | Kim, Seung-Woo | - |
dc.date.accessioned | 2013-03-18T16:36:00Z | - |
dc.date.available | 2013-03-18T16:36:00Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2006-10 | - |
dc.identifier.citation | The 2nd International Conference on Positioning Technology, v., no., pp.160 - 165 | - |
dc.identifier.uri | http://hdl.handle.net/10203/150266 | - |
dc.language | ENG | - |
dc.title | Analysis of additional leakage resulting from the feeding motion of a vacuum-compatible air bearing stage | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 160 | - |
dc.citation.endingpage | 165 | - |
dc.citation.publicationname | The 2nd International Conference on Positioning Technology | - |
dc.identifier.conferencecountry | South Korea | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | Kim, Seung-Woo | - |
dc.contributor.nonIdAuthor | G.Khim, | - |
dc.contributor.nonIdAuthor | C.H.Park, | - |
dc.contributor.nonIdAuthor | H.Lee, | - |
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