DSpace at KOASAS: Analysis of additional leakage resulting from the feeding motion of a vacuum-compatible air bearing stage

DSpace at KOASAS

College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Analysis of additional leakage resulting from the feeding motion of a vacuum-compatible air bearing stage

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G.Khim, / C.H.Park, / H.Lee, / Kim, Seung-Woo researcher

Issue Date: 2006-10

Language: ENG

Citation: The 2nd International Conference on Positioning Technology, pp.160 - 165

URI: http://hdl.handle.net/10203/150266

Appears in Collection: ME-Conference Papers(학술회의논문)

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Knowledge Service Development Team, KAIST 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea. T. 82-42-350-4493 Email. koasas@kaist.ac.kr
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Analysis of additional leakage resulting from the feeding motion of a vacuum-compatible air bearing stage

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