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Showing results 1 to 4 of 4

1
Cyclic Scheduling of Cluster Tools With Nonidentical Chamber Access Times Between Parallel Chambers

Kim, Dae-Kyu; Jung, Yu-Ju; Jung, Chi-Hyun; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.25, no.3, pp.420 - 431, 2012-08

2
Cyclic scheduling of timed petri nets : behavior, optimization, and application to cluster tools = 시간을 갖는 페트리넷의 주기적 스케쥴링 : 행태, 최적화, 클러스터 장비에의 응용link

Jung, Chi-Hyun; 정치현; et al, 한국과학기술원, 2010

3
Scheduling single-armed cluster tools with reentrant wafer flows

Lee, HY; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.19, no.2, pp.226 - 240, 2006-05

4
Scheduling start-up and close-down periods of dual-armed cluster tools with wafer delay regulation

Kim, Tae-Kyu; Jung, Chihyun; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.50, no.10, pp.2785 - 2795, 2012

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