| 1 | Adaptive Scheduling of Cluster Tools With Wafer Delay Constraints and Process Time Variation Lim, Yuchul; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.17, no.1, pp.375 - 388, 2020-01 |
| 2 | An Efficient Mixed Integer Programming Model Based on Timed Petri Nets for Diverse Complex Cluster Tool Scheduling Problems Jung, Chihyun; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.25, no.2, pp.186 - 199, 2012-05 |
| 3 | Analysis of circular cluster tools : transient behavior and semiconductor equipment models = Circular 클러스터 툴의 분석 : 불안정상태에서의 행동과 반도체 장비에 대한 모델link Ahn, Young-Hun; 안영훈; et al, 한국과학기술원, 2011 |
| 4 | Analysis of circular cluster tools : transient behavior and semiconductor equipment models = Circular 클러스터 툴의 분석 : 불안정상태에서의 행동과 반도체 장비에 대한 모델link Ahn, Young-Hun; 안영훈; et al, 한국과학기술원, 2011 |
| 5 | Completion Time Analysis of Wafer Lots in Single-Armed Cluster Tools With Parallel Processing Modules Lee, Jun-Ho; Kim, Hyunjung, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.14, no.4, pp.1622 - 1633, 2017-10 |
| 6 | Feedback Control of Cluster Tools for Regulating Wafer Delays Kim, Chulhan; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1189 - 1199, 2016-04 |
| 7 | Feedback Control of Cluster Tools: Stability Against Random Time Disruptions Kim, Chulhan; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.19, no.3, pp.2008 - 2015, 2022-07 |
| 8 | Makespan Analysis of Lot Switching Period in Cluster Tools Lee, Jun-Ho; Kim, Hyunjung, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.29, no.2, pp.127 - 136, 2016-05 |
| 9 | Modeling, Analysis, and Scheduling of Cluster Tools With Two Independent Arms Tonke, Daniel; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1176 - 1188, 2016-04 |
| 10 | Noncyclic Scheduling for Timed Discrete-Event Systems With Application to Single-Armed Cluster Tools Using Pareto-Optimal Optimization Uno, Wikborg; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.10, no.3, pp.699 - 710, 2013-07 |
| 11 | Schedulability Analysis for Noncyclic Operation of Time-Constrained Cluster Tools With Time Variation Kim, Hyunjung; Lee, Jun-Ho; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.3, pp.1409 - 1414, 2016-07 |
| 12 | Schedule Restoration for Single-Armed Cluster Tools Kim, Ja-Hee; Zhou, MengChu; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.27, no.3, pp.388 - 399, 2014-08 |
| 13 | Scheduling Cluster Tools With Ready Time Constraints for Consecutive Small Lots Kim, Hyun-Jung; Lee, Jun-Ho; Jung, Chi-Hyun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.10, no.1, pp.145 - 159, 2013-01 |
| 14 | Wafer Delay Analysis and Workload Balancing of Parallel Chambers for Dual-Armed Cluster Tools With Multiple Wafer Types Ko, Sung-Gil; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.18, no.3, pp.1516 - 1526, 2021-07 |
| 15 | 공정모듈 작업시간의 변동이 있는 양팔 클러스터 장비의 스케줄링 = Scheduling of dual-armed cluster tools with process time variationlink 최우성; Choi, Woo-seong; et al, 한국과학기술원, 2010 |
| 16 | 다중 슬롯 클러스터 장비의 안정상태 스케줄링 및 모델링 = Steady state scheduling and modeling of multi-slot cluster toolslink 정치현; Jung, Chi-Hyun; 이태억; 김영대; et al, 한국과학기술원, 2006 |
| 17 | 소 로트 웨이퍼 제조를 위한 가용시간 제약이 있는 클러스터 장비의 스케줄링 방법 = Scheduling of cluster tools with ready time constraints for small lot wafer fabricationlink 김현정; Kim, Hyun-Jung; et al, 한국과학기술원, 2011 |
| 18 | 소 로트 웨이퍼 제조를 위한 가용시간 제약이 있는 클러스터 장비의 스케줄링 방법 = Scheduling of cluster tools with ready time constraints for small lot wafer fabricationlink 김현정; Kim, Hyun-Jung; et al, 한국과학기술원, 2011 |
| 19 | 시간 변동과 시간 제약이 있는 클러스터 장비 스케줄링과 제어 = Scheduling and control of timed-constrained cluster tools with time variationlink Kim, Tae-Kyu; 김태규; et al, 한국과학기술원, 2009 |
| 20 | 챔버 클리닝 공정을 포함하는 다중 슬롯 클러스터 장비의 스케줄링 = Scheduling of multi-slot cluster tools with chamber cleaning operationlink 지영준; 이태억; et al, 한국과학기술원, 2017 |
