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Object-oriented graphical modeling of FMSs Choi, Byoung Kyu; Han, KH; Park, TY, INTERNATIONAL JOURNAL OF FLEXIBLE MANUFACTURING SYSTEMS, v.8, no.2, pp.159 - 182, 1996-04 |
SECAM: A Supervisory Equipment Control Application Model for Integrated Semiconductor Manufacturing Equipment, Lee, JH; Lee, Tae-Eog, IEEE ROBOTICS & AUTOMATION MAGAZINE, v.11, no.1, pp.41 - 58, 2004-03 |
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