Electrical and physical properties of Si1-xGex/HfO2/Si MOS-capacitorsElectrical and physical properties of Si1-xGex/HfO2/Si MOS-capacitors

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Issue Date
2003-12-11
Language
ENG
Citation

2nd International Conference on Materials for Advanced Technologies, pp.535 - 535

URI
http://hdl.handle.net/10203/146824
Appears in Collection
EE-Conference Papers(학술회의논문)
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