3D Fabrication using Deep X-ray Mask with Integrated Micro Actuator

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dc.contributor.authorLee, KC-
dc.contributor.authorLee, Seung Seob-
dc.date.accessioned2013-03-18T07:28:28Z-
dc.date.available2013-03-18T07:28:28Z-
dc.date.created2012-02-06-
dc.date.issued2003-
dc.identifier.citation16th IEEE Int. Conf. Micro Electro Mechanical System (MEMS’03), v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/146031-
dc.languageENG-
dc.title3D Fabrication using Deep X-ray Mask with Integrated Micro Actuator-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationname16th IEEE Int. Conf. Micro Electro Mechanical System (MEMS’03)-
dc.identifier.conferencecountryJapan-
dc.identifier.conferencecountryJapan-
dc.contributor.localauthorLee, Seung Seob-
dc.contributor.nonIdAuthorLee, KC-
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ME-Conference Papers(학술회의논문)
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