DSpace at KOASAS: Demonstration of Low Vt NMOSFETs Using Thin HfLaO in ALD TiN/HfSiO Gate Stack

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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Demonstration of Low Vt NMOSFETs Using Thin HfLaO in ALD TiN/HfSiO Gate StackDemonstration of Low Vt NMOSFETs Using Thin HfLaO in ALD TiN/HfSiO Gate Stack

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Cho, Byung Jin researcher / Park, CS / Song, SC / Bersuker, G / Alshareef, HN / Ju, BS / Majhi

Issue Date: 2006-09-12

Language: ENG

Citation: 2006 International Conference on Solid State Devices and Materials (SSDM 2006), pp.0 - 0

URI: http://hdl.handle.net/10203/145440

Appears in Collection: EE-Conference Papers(학술회의논문)

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Demonstration of Low Vt NMOSFETs Using Thin HfLaO in ALD TiN/HfSiO Gate StackDemonstration of Low Vt NMOSFETs Using Thin HfLaO in ALD TiN/HfSiO Gate Stack

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