Dual metal gate process scheme for wide range work function modulation and reduced Fermi level pinningDual metal gate process scheme for wide range work function modulation and reduced Fermi level pinning

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Issue Date
2005-07-03
Language
ENG
Citation

3rd International Conference on Materials for Advanced Technologies, pp.41 - 41

URI
http://hdl.handle.net/10203/145070
Appears in Collection
EE-Conference Papers(학술회의논문)
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