Synthesis of copolymers containing diazoketo groups and their application as DUV resistsSynthesis of Copolymers Containing Diazoketo Groups and Their Application as DUV Resists
- Issue Date
- 2005-02-28
- Language
- ENG
- Citation
Advances in Resist Technology and Processing XXII, v.5753, pp.1057 - 1065
- ISSN
- 1605-7422
- Appears in Collection
- CH-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.