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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Stiction-free cantilevers with rounded cross-section

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Kim, D.-H. / Jeon, J.-W. / Chang, S.-I. / Lim, Koeng Suresearcher / Yoon, Jun-Boresearcher
Issue Date
2005-01-30
Language
ENG
Citation

18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami, pp.455 - 458

ISSN
1084-6999
URI
http://hdl.handle.net/10203/143015
Appears in Collection
EE-Conference Papers(학술회의논문)
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