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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

High Precision Measurement of 3D Profile Using Confocal Differential Heterodyne Interferometer

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Gweon, Dae-Gabresearcher / Kim, TJ / Lee, SW
Issue Date
2004-11-03
Language
ENG
Citation

2nd International Symposium on Nano-manufacturing, pp.527 - 529

URI
http://hdl.handle.net/10203/142080
Appears in Collection
ME-Conference Papers(학술회의논문)
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