(Pb,Sr)TiO3(PST) thin films for ULSI DRAM capacitor prepared by liquid source misted chemical deposition(LSMCD)액적화학증착법을 이용한 초고집적 DRAM capacitor용 (Pb,Sr)TiO3(PST) 박막
- Publisher
- 한국화학공학회
- Issue Date
- 2000
- Language
- ENG
- Citation
한국화학공학회 학술발표회 , v.5, no.2, pp.4513 -
- Appears in Collection
- CBE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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