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A calibrated atomic force microscope using an orthogonal scanner and a calibrated laser interferometer Lee, Dong-Yeon; Kim, Dong-Min; Gweon, Dae-Gab; Park, Jinwon, APPLIED SURFACE SCIENCE, v.253, no.8, pp.3945 - 3951, 2007-02 |
A nanometric displacement measurement method using the detection of fringe peak movement Yi, JH; Kim, Soohyun; Kwak, Yoon Keun, MEASUREMENT SCIENCE TECHNOLOGY, v.11, no.9, pp.1352 - 1358, 2000-09 |
Design and evaluation of two dimensional metrological atomic force microscope using a planar nanoscanner Lee D.-Y.; Kim D.-M.; Gweon, Dae-Gab, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, v.45, no.3B, pp.2124 - 2127, 2006 |
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