Browse "Dept. of Mechanical Engineering(기계공학과)" bySubjectwafer fabrication

Showing results 1 to 2 of 2

1
A control method to reduce the standard deviation of flow time in wafer fabrication

Yoon, HJ; Lee, Doo Yongresearcher, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.13, no.3, pp.389 - 392, 2000-08

2
Scheduling cluster tools in wafer fabrication using candidate list and simulated annealing

Yim, SJ; Lee, Doo Yongresearcher, JOURNAL OF INTELLIGENT MANUFACTURING, v.10, no.6, pp.531 - 540, 1999-06

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