Browse "Dept. of Mechanical Engineering(기계공학과)" bySubjectwafer distribution system

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Wafer distribution system for a clean room using a novel magnetic suspension technique

Park, KH; Ahn, KY; Kim, Soohyunresearcher; Kwak, Yoon Keunresearcher, IEEE-ASME TRANSACTIONS ON MECHATRONICS, v.3, no.1, pp.73 - 78, 1998-03

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