Browse "Dept. of Mechanical Engineering(기계공학과)" bySubjectXeF2 etch

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Residual stress-driven test technique for freestanding ultrathin films: Elastic behavior and residual strain

Cuddalorepatta, Gayatri K.; Sim, Gi-Dongresearcher; Li, Han; Pantuso, Daniel; Vlassak, Joost J., JOURNAL OF MATERIALS RESEARCH, v.34, no.20, pp.3474 - 3482, 2019-10

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