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Comb-referenced laser distance interferometer for industrial nanotechnology Jang, Yoon-Soo; Wang, Guochao; Hyun, Sang-Won; Kang, Hyun Jay; Chun, Byung Jae; KIM, Young-Jin; Kim, Seung-Woo, SCIENTIFIC REPORTS, v.6, 2016-08 |
Femtosecond laser pulses for fast 3-D surface profilometry of microelectronic step-structures Joo, Woo-Deok; Kim, Seung-Man; Park, Ji-Yong; Lee, Keun-Woo; Lee, Joo-Hyung; Kim, Seung-Chul; KIM, Young-Jin; et al, OPTICS EXPRESS, v.21, no.13, pp.15323 - 15334, 2013-07 |
Time-of-flight detection of femtosecond laser pulses for precise measurement of large microelectronic step height Lu, Xing; Zhang, Shuangyou; Jeon, Chan-Gi; Kang, Chu-Shik; Kim, Jungwon; Shi, Kebin, OPTICS LETTERS, v.43, no.7, pp.1447 - 1450, 2018-04 |
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