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Fabrication of 2D, 3D SiCN Ceramic nanostructures using nano-imprinting lithography and nano-stereolithography Yang, Dong-Yol; Pham, T. A.; Kim, D.P.; Park, S. H.; Lim, T. W.; Lee, K. S., ISNM 2005, pp.0 - 0, 2005-11-01 |
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