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Showing results 1 to 5 of 5

1
Oxide thickness profile measurement by dispersive white-light interferometry in CMP process

Jeong, Haedo; Park, Boumyoung; Kim, Youngjin; Kim, Hyoungjae; Ghim, Young-Sik; You, Joonho; Kim, Seung-Woo, 2007 International Conference on Planarization/CMP Technology, ICPT 2007, pp.179 - 186, VDE Verlag GmbH, 2007-10

2
Spectrally resolved white-light interferometry for 3D inspection of a thin-film layer structure

Ghim, Young-Sik; Kim, Seung-Woo, APPLIED OPTICS, v.48, no.4, pp.799 - 803, 2009-02

3
Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry

Ghim, Young-Sik; Kim, Seung-Woo, OPTICS EXPRESS, v.14, no.24, pp.11885 - 11891, 2006-11

4
가상의 백색광 주사 간섭계의 개발 = Virtual white-light scanning interferometerlink

김영식; Ghim, Young-Sik; et al, 한국과학기술원, 2003

5
박막 두께 형상 및 굴절률 측정용 분산 백색광 간섭법 = Dispersive white-light interferometry for measurements of thin-film thickness profile and refractive indexlink

김영식; Ghim, Young-Sik; et al, 한국과학기술원, 2007

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