Browse "Dept. of Mechanical Engineering(기계공학과)" byAuthorEom, Cheonil

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Optimal design of high stiffness XYZ 3-axis stage for AFM system

Gweon, Dae-Gabresearcher; Kim, DM; Kang, DW; Shim, JY; Eom, Cheonil, ASPE 2003 Anual meeting, 2003-10-30

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