Browse "Dept. of Mechanical Engineering(기계공학과)" byAuthorC.H.Park,

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Analysis of additional leakage resulting from the feeding motion of a vacuum-compatible air bearing stage

G.Khim,; C.H.Park,; H.Lee,; Kim, Seung-Wooresearcher, The 2nd International Conference on Positioning Technology, pp.160 - 165, 2006-10

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