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Scratching of Patterned Cu/Dielectric Surface Layers by Pad Asperities in CMP Kim, Sanha; Saka, Nannaji; Chun, Jung-Hoon, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.28, no.1, pp.96 - 105, 2015-02 |
작용-유도 분자 동역학을 이용한 나노시스템의 결함거동 연구 = A study on defect behaviors in nanosystems using action-derived molecular dynamics methodlink 이영민; Lee, Young-Min; et al, 한국과학기술원, 2010 |
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