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Experimental study on squeeze film damping of perforated micromechanical structures oscillating perpendicular to the substrate Kim, Eung-Sam; Han, Ki-Ho; Cho, Young-Ho; Kim, Moon Uhn, SENSORS AND MATERIALS, v.18, no.7, pp.381 - 393, 2006 |
High-resolution capacitive subnanometric motion detectors using branched finger electrodes with high-amplitude sense voltage = 고감지전압 및 가지전극을 이용한 고정도 정전용량형 나노운동 감지체 및 응용link Han, Ki-Ho; 한기호; et al, 한국과학기술원, 2002 |
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