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Estimation of 2D position and flatness errors for a planar XY stage based on measured guideway profiles Hwang, Jooho; Park, Chun-Hong; Kim, Seung-Woo, INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v.8, no.2, pp.64 - 69, 2007-04 |
Self-calibration algorithm for testing out-of-plane errors of two-dimensional profiling stages Yoo, SB; Kim, Seung-Woo, INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, v.44, no.7-8, pp.767 - 774, 2004-06 |
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