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A new nano-accuracy AFM system for minimizing Abbe errors and the evaluation of its measuring uncertainty Kim, Dongmin; Lee, Dong Yeon; Gweon, Dae-Gab, ULTRAMICROSCOPY, v.107, no.4-5, pp.322 - 328, 2007-04 |
자가 보정을 이용한 정밀 기계의 계통오차 계산 = Self-calibration of systematic errors for precision machineslink 유승봉; Yoo, Seung-Bong; et al, 한국과학기술원, 2004 |
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