DSpace at KOASAS: In-situ plasma diagnosis of chemical species in microwave plasma-assisted chemical vapour deposition for the growth of carbon nanotubes using CH4/H2/NH3 gases

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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

In-situ plasma diagnosis of chemical species in microwave plasma-assisted chemical vapour deposition for the growth of carbon nanotubes using CH4/H2/NH3 gases

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Woo, YS / Han, IT / Lee, NS / Jung, JE / Jeon, Duk Young researcher / Kim, JM

Issue Date: 2000-04-25

Language: ENG

Citation: Electron-Emissive Materials, Vacuum Microelectronics and Flat-Panel Displays, v.621

ISSN: 0272-9172

URI: http://hdl.handle.net/10203/129068

Appears in Collection: MS-Conference Papers(학술회의논문)

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