Monolithic integration of 3-D electroplated microstructures with unlimited number of levels using planarization with a sacrificial metallic mold (PSMM)
- Publisher
- IEEE
- Issue Date
- 1999-01-17
- Language
- English
- Citation
Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, pp.624 - 629
- Appears in Collection
- EE-Conference Papers(학술회의논문)RIMS Conference Papers
- Files in This Item
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