Electrothermal Modeling of Micromachined Planar Diaphragm Structures
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 윤의식 | - |
| dc.date.accessioned | 2013-03-15T20:03:29Z | - |
| dc.date.available | 2013-03-15T20:03:29Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1996 | - |
| dc.identifier.citation | Proc. of the 7th Conf. on Sensor Technology, v., no., pp.171 - 176 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/123361 | - |
| dc.language | KOR | - |
| dc.title | Electrothermal Modeling of Micromachined Planar Diaphragm Structures | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 171 | - |
| dc.citation.endingpage | 176 | - |
| dc.citation.publicationname | Proc. of the 7th Conf. on Sensor Technology | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 윤의식 | - |
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