DSpace at KOASAS: The Effect of Electron Emission on The Roughness of Silicon Films in Catalytic CVD

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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

The Effect of Electron Emission on The Roughness of Silicon Films in Catalytic CVD

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Yoon, Duk Yong

Issue Date: 1998

Language: ENG

Citation: Proceedings of the 3rd Pacific Rim International Conference (PRICM-3), pp.2733 - 2738

URI: http://hdl.handle.net/10203/122096

Appears in Collection: MS-Conference Papers(학술회의논문)

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