Dry Etching Characteristics of Pt electrode in Ferroelectric Capacitor강유전체 커패시터에 대한 백금전극의 건식식각 특성
- Issue Date
- 1998-01-01
- Language
- ENG
- Citation
The 5th Korean Conference on Semiconductors
- Appears in Collection
- CBE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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