초정밀 위치결정을 위한 이중서보제어용 미세구동 메카니즘A Fine Motion Mechanism of Dual Servo Control for Ultraprecision Positioning

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In order to respond to the increasing demands of ultraprecision positioning mechanism in the field of precision engineering, more accurate stages are needed whose positioning uncertainty should be in the unprecedented level of nanometers, while maintaining a long travek range. For this application, most conventional stage mechanisms are found not suitable, so the concept of dual servo, which uses two different servos, is one of the new design and control strategies being extensively investigated these days, This paper presents a fine motion mechanism as a part of research on the dual servo control. The stage is made of a single structure of elastic flexure, whose xy .theta. motions are induced in the form of elastic deformation activated by three piezoelectric actuators. Experimental results show that the translational and rotational motions of the stage can be controlled with resolutions of 5 nm and 0.1 arcsec, respectively.
Publisher
한국정밀공학회
Issue Date
1993
Language
KOR
Citation

한국정밀공학회 1993년도 추계학술대회, pp.249 - 254

URI
http://hdl.handle.net/10203/114967
Appears in Collection
ME-Conference Papers(학술회의논문)
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