A Mathematical model of the Silicon Chemical Vapor Deposition in an atmospheric Pressure cold-wall reactor
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Park, Chong-Ook | ko |
| dc.contributor.author | Chun, Soung Soon | ko |
| dc.contributor.author | Park, YJ | ko |
| dc.contributor.author | Min, GJ | ko |
| dc.contributor.author | Park, YW | ko |
| dc.date.accessioned | 2013-03-14T22:55:53Z | - |
| dc.date.available | 2013-03-14T22:55:53Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1989-06 | - |
| dc.identifier.citation | Euro CVD 7th conference, C5-45 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/114262 | - |
| dc.language | English | - |
| dc.publisher | European conference on CVD | - |
| dc.title | A Mathematical model of the Silicon Chemical Vapor Deposition in an atmospheric Pressure cold-wall reactor | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | Euro CVD 7th conference, C5-45 | - |
| dc.identifier.conferencecountry | FR | - |
| dc.identifier.conferencelocation | Perpignan | - |
| dc.contributor.localauthor | Park, Chong-Ook | - |
| dc.contributor.localauthor | Chun, Soung Soon | - |
| dc.contributor.nonIdAuthor | Park, YJ | - |
| dc.contributor.nonIdAuthor | Min, GJ | - |
| dc.contributor.nonIdAuthor | Park, YW | - |
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