Preparation and Characterization of SOG thin film for interdielectric layer and planarization

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Issue Date
1993
Language
ENG
Citation

3rd Industry/Academy Cooperation Research Seminar, Electronic Ceramics Research Center, pp.119 - 225

URI
http://hdl.handle.net/10203/112996
Appears in Collection
CBE-Conference Papers(학술회의논문)
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