Polymerization, characterization & Evaluation of poly(N-(tert-butoxy-carbonyloxyphenyl) maleimde/styrene/maleimide) for new electron-beam resists

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Publisher
한국고분자학회
Issue Date
1992
Language
ENG
Citation

1992 한국고분자학회 학술발표회

URI
http://hdl.handle.net/10203/111121
Appears in Collection
CBE-Conference Papers(학술회의논문)
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