Modelling and Simulation Study on Chemical Vapor Deposition Process for Silicon Carbide Film

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 315
  • Download : 0
Issue Date
1988
Language
ENG
Citation

The Conference on Semi-conductors, Materizals, Components and Computer Aided Design, pp.112 -

URI
http://hdl.handle.net/10203/110912
Appears in Collection
CBE-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0