Modelling and Simulation Study on Chemical Vapor Deposition Process for Silicon Carbide Film

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Issue Date
1988
Language
ENG
Citation

The Conference on Semi-conductors, Materizals, Components and Computer Aided Design, pp.112 -

URI
http://hdl.handle.net/10203/110912
Appears in Collection
CBE-Conference Papers(학술회의논문)
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