The Effect of Reaction Condition on the Crystallographic Orientation and Surface Morphology of Chemical Vapor Deposited Al2O3

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Publisher
European Conference on Chemical Vapour Deposition
Issue Date
1983-05
Language
English
Citation

Proc. EURO CVD 4, Chemical Vapor Deposition , pp.410

URI
http://hdl.handle.net/10203/110609
Appears in Collection
RIMS Conference PapersRIMS Conference Papers
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