RF 마그네트론 스퍼터링법으로 제조된 SrTiO3 박막의 계면분석에 관한 연구

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Issue Date
1992
Language
KOR
Citation

한국진공학회

URI
http://hdl.handle.net/10203/110142
Appears in Collection
MS-Conference Papers(학술회의논문)
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