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Showing results 1 to 6 of 6

1
Control and analysis of ion species in N-2 inductively coupled plasma with inert gas mixing

Bai, KH; Lee, DS; Chang, Hong-Young; Uhm, HS, APPLIED PHYSICS LETTERS, v.80, no.21, pp.3907 - 3909, 2002-05

2
Dispersion relation in plasmas generated by a sheath-helix antenna

Uhm, HS; Uhm, SH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.91, no.3, pp.1031 - 1039, 2002-02

3
Electron temperature analysis of two-gas-species inductively coupled plasma

Bai, KH; Chang, Hong-Young; Uhm, HS, APPLIED PHYSICS LETTERS, v.79, no.11, pp.1596 - 1598, 2001-09

4
Plasma parameters analysis of various mixed gas inductively coupled plasmas

Bai, KH; You, SJ; Chang, Hong-Young; Uhm, HS, PHYSICS OF PLASMAS, v.9, no.6, pp.2831 - 2838, 2002-06

5
Plasmas Generated by Axisymmetric Helicon Antenna

Uhm, HS; Uhm, SH; Chang, Hong-Young, 43rd Annual Meeting of the APS Division of Plasma Physics , APS, 2001

6
Properties of Plasmas generated by a Sheath-Helix Antenna

Uhm, HS; Uhm, SH; Chang, Hong-Young, IEEE PPPS 2002, IEEE, 2002

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