Browse "College of Natural Sciences(자연과학대학)" byAuthorNa, Byung Keun

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Three-step decay of the plasma density near the substrate in pulsed-dc magnetron sputtering discharge

In, Jung Hwan; Na, Byung Keun; Seo, SH; Chang, Hong-Youngresearcher; Han, JG, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.18, 2009-11

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