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A cutoff probe for the measurement of high density plasma You, Kwang-Ho; You, S. J.; Kim, D. W.; Na, Byung-Keun; Seo, Byong-Hoon; Kim, J. H.; Shin, Y. H.; et al, THIN SOLID FILMS, v.547, pp.250 - 255, 2013-11 |
Plasma density measurement with ring-type cutoff probe Kim, D. W.; You, S. J.; Na, Byungkeun; Kim, J. H.; Shin, YH; Chang, Hong-Young; Oh, Wang-Yuhl, THIN SOLID FILMS, v.547, pp.280 - 284, 2013-11 |
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