DC Field | Value | Language |
---|---|---|
dc.contributor.author | Shin, Jung H. | - |
dc.contributor.author | Chang, Jee Soo | - |
dc.contributor.author | Kim, Myung-Ki | - |
dc.contributor.author | Lee, Yong-Hee | - |
dc.date.accessioned | 2009-08-28T08:11:22Z | - |
dc.date.available | 2009-08-28T08:11:22Z | - |
dc.date.issued | 2008-02-12 | - |
dc.identifier.citation | Proc. of SPIE Vol. 6897 | en |
dc.identifier.uri | http://hdl.handle.net/10203/10856 | - |
dc.description.abstract | Micro-disk resonators were fabricated using Er doped silicon-rich silicon nitride (SRSN:Er). SRSN:Er thin films are fully CMOS-compatible and show efficient Er3+ luminescence pumped off-resonantly via Si nanoclusters. The high refractive index of SRSN (>2.0 at 1.5 um) allows freedom in designing compact micro-disk resonators. Micro-disks with two different contents of Er (0.2 at.%, 0.02 at.%) with a diameter of 25 um were fabricated, and characterized using evanescent coupling using tapered fibers. Whispering gallery modes with Q-factors in excess of 13000 were obtained, and FDTD calculations indicate that much higher values should be possible. Finally, we demonstrate excitation of fundamental whispering gallery mode via off-resonant, top-pumping of the SRSN microdisk. | en |
dc.language.iso | en_US | en |
dc.publisher | International Society for Optical Engineering (SPIE) | en |
dc.subject | Silicon-rich silicon nitride | en |
dc.subject | Er | en |
dc.subject | micro-disk | en |
dc.title | Fabrication and characterization of Er doped silicon-rich silicon nitride (SRSN) micro-disks | en |
dc.type | Article | en |
dc.identifier.doi | 10.1117/12.764327 | - |
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