Deflection Sensitivity Calibration of Heated Microcantilevers Using Pseudo-Gratings

Abstract

We report a technique to calibrate the sensitivity of sensor-integrated atomic force microscope cantilevers using pseudo-gratings. An offset signal superposed onto the cantilever control signal modulates the cantilever position over a flat surface, driving the cantilever toward and away from the surface in a controlled way. The relationship between the cantilever sensor signal and displacement provides the cantilever calibration. We show how this technique can be used to calibrate heated micro-cantilever sensors.