Browse by Subject wafer delay

Showing results 1 to 7 of 7

1
Adaptive Scheduling of Cluster Tools With Wafer Delay Constraints and Process Time Variation

Lim, Yuchul; Yu, Tae-Sun; Lee, Tae-Eogresearcher, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.17, no.1, pp.375 - 388, 2020-01

2
Feedback Control of Cluster Tools for Regulating Wafer Delays

Kim, Chulhan; Lee, Tae-Eogresearcher, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1189 - 1199, 2016-04

3
Feedback control of cluster tools with time constraints = 시간 제약을 가지는 클러스터 장비의 피드백 제어link

Kim, Chulhan; 김철한; et al, 한국과학기술원, 2015

4
Schedulability analysis of time-constrained cluster tools with bounded time variation by an extended Petri net

Kim, JH; Lee, Tae-Eogresearcher, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.5, no.3, pp.490 - 503, 2008-07

5
Scheduling start-up and close-down periods of dual-armed cluster tools with wafer delay regulation

Kim, Tae-Kyu; Jung, Chihyun; Lee, Tae-Eogresearcher, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.50, no.10, pp.2785 - 2795, 2012

6
Token Delays and Generalized Workload Balancing for Timed Event Graphs with Application to Cluster Tool

Lee, Tae-Eog; Lee, Hwan-Yong; Sreenivas, Ramavarapu S., Proceeding of the 2006 IEEE Cinference on Automation Science and Engineering, pp.93-99, 2006

7
Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations

Yu, Tae-Sun; Lee, Tae-Eogresearcher, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.58, no.2, pp.434 - 447, 2020-01

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