Browse bySubjecttitanium oxide thin film

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Titanium oxide film for the bottom antireflective layer in deep ultraviolet lithography

Jun, BH; Han, SS; Kim, KS; Lee, JS; Jiang, ZT; Bae, Byeong-Sooresearcher; No, Kwangsooresearcher; et al, APPLIED OPTICS, v.36, no.7, pp.1482 - 1486, 1997-03

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