Browse bySubjecttitanium oxidation

Showing results 1 to 2 of 2

1
Platinum hillocks in Pt/Ti film stacks deposited on thermally oxidized Si substrate

Kweon, SY; Choi, Si-Kyungresearcher; Yeom, SJ; Roh, JS, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.40, no.10, pp.5850 - 5855, 2001-10

2
$SrBi_2Ta_2O_9$ 강유전체 비 휘발 기억소자에서 Pt/Ti 전극의 hillock 생성 = Hillock formation in Pt/Ti electrode for $SrBi_2Ta_2O_9$ ferroelectric random access memorylink

권순용; Kweon, Soon-Yong; et al, 한국과학기술원, 2002

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