Browse bySubjectoxygen ion-assisted deposition

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Effect of oxygen ion energy and annealing in formation of tin oxide thin films

Song, SK; Choi, WK; Cho, JS; Jung, HJ; Choi, D; Lee, JeongYongresearcher; Baik, HK; et al, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.36, no.4A, pp.2281 - 2287, 1997-04

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