Browse by Subject bulk micromachining

Showing results 1 to 4 of 4

1
A skew-symmetric cantilever accelerometer for automotive airbag applications

Kim, KH; Ko, JS; Cho, Young-Ho; Lee, Kwyro; Kwak, Byung Man; Park, K, SENSORS AND ACTUATORS A-PHYSICAL, v.50, no.1-2, pp.121 - 126, 1995-08

2
An optomechanical pressure sensor using multimode interference couplers with polymer waveguides on a thin p(+)-Si membrane

Hah, D; Yoon, E; Hong, Songcheol, SENSORS AND ACTUATORS A-PHYSICAL, v.79, no.3, pp.204 - 210, 2000-02

3
Hermetically sealed inductor-capacitor (LC) resonator for remote pressure monitoring

Park, EC; Yoon, Jun-Bo; Yoon, E, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.37, no.12B, pp.7124 - 7128, 1998-12

4
Thermally driven thin film bulk acoustic resonator voltage controlled oscillators integrated with microheater elements

Lee, HM; Kim, HT; Choi, HK; Hong, HK; Lee, DH; Park, JY; Bu, JU; et al, JAPANESE JOURNAL OF APPLIED PHYSICS, v.43, no.1A-B, pp.L85 - L87, 2004-01

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